Large-Size PLD Gallium Nitride Fabrication
1.Special Target Manipulator Design
AdNaNoTek's specialized PLD design allows substrate manipulator to do both rotation and tilting. The change in the normal line from the target to the substrate surface result in the change of the deposition position and range, hence allowing deposition on larger sized wafer.
AdNaNoTek, successfully fabricated high quality Gallium Nitride (GaN) thin film with size larger than 4 inches using PLD. AdNaNoTek still continuously working on to further improve and optimize the large scale deposition process.