SE - 4500: MSD - E-BE/MBE
AdNaNoTek 's SE - 4500 is an linear integration system including Magnetron Sputtering and E-Beam Evaporator (with effusion cell module) coating tools.
Researchers can operate the systems individually or combine multi/different coating process through the UHV linear transferring system.
All systems are UHV compatible (5E-9torr) in SE - 4500, and the tunnel system can be extended unlimitedly.
Researchers can operate the systems individually or combine multi/different coating process through the UHV linear transferring system.
All systems are UHV compatible (5E-9torr) in SE - 4500, and the tunnel system can be extended unlimitedly.
Integrated Components
UHV-Magnetron Sputtering System (MSD-24)
MAIN SPECIFICATIONS:
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Electron Beam Evaporator with Effusion Cell Module (E-Beam-1M)
MAIN SPECIFICATIONS:
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Optional
- Pre-heating (degassing) system
- Automatic transferring system
- ARPES analyzer system
- SEM
- STM
- IBSD