Sputter system | e beam evaporator | PLD | Pulsed laser deposition
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專業機構設計團隊

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客製化-腔體

1.腔體尺寸
2.Port數量
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MBE腔體

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客製化-Target Roating Driving

1.Target數量
2.Target 尺寸
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可公自轉旋轉機構

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客製化-Manipulator

1.加熱器種類
2.Sample Holder 尺寸
3.Sample 需求溫度
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客製化-多系統整合

1.依實驗室空間,來規劃儀器的架設。
2.Load Lock、傳輸軸,氣路設計。
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PLD+Sputter整合系統
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PLD+MBE+Sputter整合系統
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PLD+Evaporator

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相關連結:
  • 產品-客製化鍍膜機系統
  • 產品-客製化鍍膜機整合系統

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UHV Deposition Systems
Integrated UHV Systems
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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy ( Laser MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD
    • SPUTTER
    • E-Beam evaporator
    • IBSD and IBE
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Substrate Manipulator
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • XYZ stage
    • Transfer Arms
  • Media
  • Contact