法蘭、管件(UHV-Flange,Tube)

觀察窗(View Port)

快取門(Quick Access Door)

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快取門(Quick Access Door)

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Double Oring Quick Access Door

View Port

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激光入射窗(Laser Port)

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激光入射窗(Laser Port)

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特殊法蘭

轉換法蘭CF6.75-4.5

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特殊CF 4.5雙刀口法蘭

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轉換法蘭CF6.75-4.5

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活動法蘭 

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擋板(Shutter)

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真空管件(Vacuum Tube)