法蘭、管件(UHV-Flange,Tube)

觀察窗(View Port)

快取門(Quick Access Door)

快取門(Quick Access Door)

Double Oring Quick Access Door

View Port

激光入射窗(Laser Port)

激光入射窗(Laser Port)

特殊法蘭

轉換法蘭CF6.75-4.5

特殊CF 4.5雙刀口法蘭

轉換法蘭CF6.75-4.5

活動法蘭 

擋板(Shutter)

真空管件(Vacuum Tube)