Dragon Line - 6000: E-Beam - Thermal - Sputter - IBE - RIE (with Glove Box)

AdNaNoTek's Dragon Line - 6000 is a linear integrated UHV deposition systems which include the following: Electron Beam Evaporator (EBE-1), Thermal Evaporator (TE-3), and Magnetron Sputtering (MSD) coating tools; with Ion Beam Etching, Reactive Ion Etching (RIE) and Glove Box.
Researchers can operate the systems individually or combine series of deposition processes through the UHV Linear Transfer System (LTS).
All systems are UHV compatible (5E-10torr) and the transfer system can be extended indefinitely

Integrated Components

UHV Ion-Beam Etching (IBE)

MAIN SPECIFICATIONS:
  • Cylindrical dome shape chamber
  • Substrate size: 4-in
  • Base pressure 5E-10torr
  • 360° rotation and ±45° tilt manipulator
  • KRI RF-ICP ion source with control software
  • Water cooling
  • 1200l/s Pfeiffer turbo pump
  • MFC and Pressure control system
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software

UHV-Magnetron Sputtering (MSD - 24)

MAIN SPECIFICATIONS:
  • Cylindrical dome shape chamber
  • Substrate size: 4-in
  • Base pressure 5E-10torr
  • 4-axis (XYZR) manipulator
  • Heating temperature up to >1000°C
  • 3-6 magnetron sputtering sources
  • RF and DC Power Supplies
  • Water cooling
  • 700l/s Pfeiffer turbo pump
  • Differential pumping mechanism
  • MFC and Pressure control system
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software

Reactive Ion Etching (RIE-6)

MAIN SPECIFICATIONS:
  • Box type chamber
  • Base pressure 5E-7torr
  • 4-in substrate platen (max 8-in)
  • Gas Shower head
  • 6 MFC controlled gas lines
  • Axial symmetry evacuation design
  • Pressure control system
  • 700l/s Pfeiffer turbo pump
  • Differential pumping mechanism
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software
  • optional: ICP-RIE

Thermal Evaporator (Metal)

MAIN SPECIFICATIONS:
  • Cylindrical dome shape chamber
  • Base pressure 5E-10torr
  • 4-axis (XYZR) manipulator
  • 2 Thermal Boats around 1400C
  • Dual Sensor Thickness monitor
  • 700l/s Pfeiffer turbo pump
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software

Thermal Evaporator (SiO)

MAIN SPECIFICATIONS:
  • Cylindrical dome shape chamber
  • Base pressure 5E-10torr
  • 4-axis (XYZR) manipulator
  • Chimney type evaporator around 2000C
  • Dual Sensor Thickness monitor
  • 700l/s Pfeiffer turbo pump
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software
UHV Linear Transfer Tunnel System

Optional

  • Pre-heating (degassing) system
  • Automatic transferring system
  • ARPES analyzer system
  • SEM
  • STM
  • IBSD