Dragon Line - 6000: E-Beam - Thermal - Sputter - IBE - RIE (with Glove Box)
AdNaNoTek's Dragon Line - 6000 is a linear integrated UHV deposition systems which include the following: Electron Beam Evaporator (EBE-1), Thermal Evaporator (TE-3), and Magnetron Sputtering (MSD) coating tools; with Ion Beam Etching, Reactive Ion Etching (RIE) and Glove Box.
Researchers can operate the systems individually or combine series of deposition processes through the UHV Linear Transfer System (LTS).
All systems are UHV compatible (5E-10torr) and the transfer system can be extended indefinitely
Researchers can operate the systems individually or combine series of deposition processes through the UHV Linear Transfer System (LTS).
All systems are UHV compatible (5E-10torr) and the transfer system can be extended indefinitely
Integrated Components
UHV Ion-Beam Etching (IBE)
MAIN SPECIFICATIONS:
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UHV-Magnetron Sputtering (MSD - 24)
MAIN SPECIFICATIONS:
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Reactive Ion Etching (RIE-6)
MAIN SPECIFICATIONS:
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Thermal Evaporator (Metal)
MAIN SPECIFICATIONS:
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Thermal Evaporator (SiO)
MAIN SPECIFICATIONS:
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Optional
- Pre-heating (degassing) system
- Automatic transferring system
- ARPES analyzer system
- SEM
- STM
- IBSD