IP - 4000: IBSD - PLD

AdNaNoTek's IP - 4000 is an linear integration system that includes PLD and IBSD deposition systems.
Researchers can operate the systems individually or combine series of deposition process through the UHV linear transfer system.
All systems are UHV compatible (5E-10torr) and the tunnel system can be extended indefinitely.

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Integrated Components

Pulsed-Laser Deposition (PLD - 12)

MAIN SPECIFICATIONS:

• 12-in spherical chamber with mirror polish
  
• Base pressure 5E-10torr
• 4-axis (XYZR) manipulator with laser heater
• Heating temperature above 1100°C
• Planetary target manipulator with 6 1-in target holder (size depends on request)
• Mask with control software
• Pressure control system
• 1200 Pfeiffer turbo pump
• Full range vacuum gauge
• Industrial computer with 23" touchscreen monitor
• System software Control
• Laser optical path
• Excimer laser (sold separately)

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UHV Ion-Beam Deposition (IBSD - 20)

MAIN SPECIFICATIONS:

• Base pressure 5E-10torr
• 4-axis (XYZR) manipulator with SiC heater
  
• Heating temperature up to 900°C
  
• KRI ion beam deposition source
  
• 4 sputter cathodes available
  
• Dual mask system with control software
  
• Thickness monitor
  
• Ion beam assisted source (optional)
  
• Pressure control system
  
• 700l/s Pfeiffer turbo pump
  
• 6900l/s cryo pump
  
• Full range vacuum gauge
  
• Industrial computer with 23" touchscreen monitor
  
• System control software
  

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Optional

• Pre-heating (degassing) system
• Automatic transferring system
• ARPES analyzer system
• SEM system
• STM system
• MBE system

Integrated UHV Systems