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Picture
Picture

Isolation Gate Valves

Ultra-High & High Vacuum Isolation Gate Valves

Gate Valve's Mechanism 


Picture
Ceramics Ball type Main Features
- Clean
- Self-lubricated 
- Less friction 
- Chemical resistance 



​
1- Ceramics Balls
2- Seal Plate Mechanism
3- Interface Flanges
4- Gate Seal O-Ring


Isolation Gate Valves- Pneumatic Version


​Features
​

- Sizes are from 1-1/2", 2", 2-1/2", 3", 4", 6", 8", 10" and 12"
- Ceramic Ball type design, high purity and less  particles.

​- Easy to maintenance, 2 steps to disassemble the valves for O-Ring replacement.

- Small footprint, compact design, saving space.

Product's Specification 


Picture
Seal Materials
Specification
Mechanical Feedthrough
Welded Bellows AM350
UHV Bonnet Seal
Cooper Gasket (OFHC)
HV Bonnet Seal
O-Ring (FKM)
Gate Seal 
O-Ring (FKM)
UHV & HV Isolation Pneumatic Gate Valves Series
Specification 
​​Operating Options
​Pneumatic operating
​Operating pressure
​​4~7 kgf/cm2 ​​
Vacuum Rate
(UHV Grade)
1.4 ~ 1.33x10-10 mbar
Vacuum Rate 
​(HV Grade)
1.4 ~ 1.33x10-9 mbar ​
​Valve Body Leak Rate 
​
(UHV Grade)
5x10-10 mbar l/s, He
​​​Valve Body Leak Rate 
​(HV Grade)
5x10-9 mbar l/s, He
Gate Seal Leak Rate
1.33x10-9 mbar l/s, He​​​
​​Position Indicator ​
Reed Type Sensor​

Products Information 

We also provide all products details in CAD and STP files, please contact us for further information.

Vacuum Level
Normial OD
Flange type and sizes
Part Number
UHV
1-1/2"
DN40CF
GVP-UHV-CF40-SS
UHV
2-1/2"
DN63CF
GVP-UHV-CF63-SS
UHV
4"
DN100CF
GVP-UHV-CF100-SS
UHV
6"
DN160CF
GVP-UHV-CF160-SS
UHV
8"
DN200CF
GVP-UHV-CF200-SS
UHV
10"
DN250CF
GVP-UHV-CF250-SS
UHV
12"
DN300CF
GVP-UHV-CF300-SS
HV
1-1/2"
DN40KF
GVP-HV-KF40-SS
HV
2"
DN50KF
GVP-UHV-KF50-SS
HV
2-1/2"
DN63ISO-F
GVP-HV-ISO63-SS
HV
3"
DN80ISO-F
GVP-HV-ISO80-SS
HV
4"
DN100ISO-F
GVP-HV-ISO100-SS
HV
6"
DN160ISO-F
GVP-HV-ISO160-SS
HV
8"
DN200ISO-F
GVP-HV-ISO200-SS
HV
10"
DN250ISO-F
GVP-HV-ISO250-SS
HV
12"
DN320ISO-F
GVP-HV-ISO320-SS

Solenoid Options:


Please add the solenoid part number after the Gate Valve's part number.
For example: DN 100 ISO-F type flange, solenoid option for DC24V, Part number = GVP-HV-ISO100-SS-S24
Voltage Options
Part number
DC12V
S12
DC24V
S24
AV110V
S110
AC220V
S220

PLEASE CONTACT US FOR ORDER 
Order Now!!!

adnano-tek_vacuum_product_catalog-gate_valve_english_version.pdfCatalog Download

Picture
adnano-tek_vacuum_product_catalog-gate_valve_english_version.pdf
File Size: 845 kb
File Type: pdf
Download File

Operation Manual Download

Picture
adnano-tek_vacuum_gate_valve_operation_manual.pdf
File Size: 1948 kb
File Type: pdf
Download File


Isolation Gate Valves- Manual Version

Features
​

- Sizes are from 1-1/2", 2", 2-1/2", 3", 4", 6", 8", 10" and 12"
- Ceramic Ball type design, high purity and less  particles.

​- Easy to maintenance, 2 steps to disassemble the valves for O-Ring replacement.

- Small footprint, compact design, saving space.

Picture
Special Feature for Manual Gate Valve

Optional for MSL (Manual Safety Lock).
​
- Position lock
- Easy to operate
​- Visual check position indicator

Product's Specification 


Picture
Seal Materials
Specification
Mechanical Feedthrough
Welded Bellows AM350
UHV Bonnet Seal
Cooper Gasket (OFHC)
HV Bonnet Seal
O-Ring (FKM)
Gate Seal
O-Ring (FKM)
UHV & HV Isolation Manual Gate Valves Series
Specification ​
Operating Options
Wheel manual operating
​​Device Safety (Only Optional for Manual)
​​Mechanic lock system (Fully open and close)
Vacuum Rate
(UHV Grade)
1.4 ~ 1.33x10-10 mbar
​Vacuum Rate 
​(HV Grade)
​1.4 ~ 1.33x10-9 mbar
​​Valve Body Leak Rate
​(UHV Grade)
5x10-10 mbar l/s, He
Valve Body Leak Rate 
​(HV Grade)
5x10-9 mbar l/s, He
​Gate Seal Leak Rate
​1.33x10-9 mbar l/s, He​​​
Position Indicator
Visual Device

Product Information

We also provide all products details in CAD and STP files, please contact us for further information.

Vacuum Level
Normial OD
​Flange type and sizes
Part Number
UHV
1-1/2"
DN40CF
GVM-UHV-CF40-SS
UHV
2-1/2"
DN63CF
GVM-UHV-CF63-SS
UHV
4"
DN100CF
GVM-UHV-CF100-SS
UHV
6"
DN160CF
GVM-UHV-CF160-SS
UHV
8"
DN200CF
GVM-UHV-CF200-SS
UHV
10"
DN250CF
GVM-UHV-CF250-SS
UHV
12"
DN300CF
GVM-UHV-CF300-SS
HV
1-1/2"
DN40KF
GVM-HV-KF40-SS
HV
2"
DN50KF
GVM-HV-KF50-SS
HV
2-1/2"
DN63ISO-F
GVM-HV-ISO63-SS
HV
3"
DN80ISO-F
GVM-HV-ISO80-SS
HV
4"
DN100ISO-F
GVM-HV-ISO100-SS
HV
6"
DN160ISO-F
GVM-HV-ISO160-SS
HV
8"
DN200ISO-F
GVM-HV-ISO200-SS
HV
10"
DN250ISO-F
GVM-HV-ISO250-SS
HV
12"
DN320ISO-F
GVM-HV-ISO320-SS

Manual Safety Lock Option


Please add the part number after the Gate Valve's part number.
For example: DN 100 ISO-F type flange, manual safety lock option. Part number = GVM-HV-ISO100-SS-MSL
  • Manual Option
Part number
Manual Safety Lock
MSL
PLEASE CONTACT US FOR ORDER ​
Order Now!!!

Spare Part Order Information


The DIY Service Package is including 1x Seal Plate O-ring and 1x Bonnent seal O-ring ( For High Vacuum grade).
1x Seal Plate O-ring and 1x Bonnet seal metal gasket .( For Ultra High Vacuum grade)
Spare Part Number
Description
​Suitable to Gate Valve Part Number​
GSP-UHV-1.5-PK
DIY Service Pack for 1-1/2",UHV Valve
GVP-UHV-CF40-SS
GVM-UHV-CF-SS

GSP-HV-1.5-PK
DIY Service Pack for 1-1/2",HV Valve
GVP-HV-KF40-SS
GVM-HV-KF-SS

GSP-HV-2-PK
DIY Service Pack for 2",HV Valve
GVP-HV-KF50-SS
GVM-HV-KF50-SS

GSP-UHV-2.5-PK
DIY Service Pack for 2-1/2", UHV Valve
GVP-UHV-CF63-SS
GVM-UHV-CF63-SS

GSP-HV-2.5-PK
DIY Service Pack for 2-1/2",HV Valve
GVP-HV-ISO63-SS
GVM-HV-ISO63-SS

GSP-HV-3-PK
DIY Service Pack for 3",HV Valve
GVP-HV-ISO80-SS
​GVM-HV-ISO80-SS
GSP-UHV-4-PK
DIY Service Pack for 4", UHV Valve
GVP-UHV-CF100-SS
GVM-UHV-CF100-SS

GSP-HV-4-PK
DIY Service Pack for 4",HV Valve
GVP-HV-ISO100-SS
GVM-HV-ISO100-SS

GSP-UHV-6-PK
DIY Service Pack for 6",UHV Valve
GVP-UHV-CF160-SS
GVM-UHV-CF160-SS

GSP-HV-6-PK
DIY Service Pack for 6",HV Valve
GVP-HV-ISO160-SS
GVM-HV-ISO160-SS

GSP-UHV-8-PK
DIY Service Pack for 8",UHV Valve
GVP-UHV-CF200-SS
GVM-UHV-CF200-SS

GSP-HV-8-PK
DIY Service Pack for 8",HV Valve
GVP-HV-ISO200-SS
GVM-HV-ISO200-SS

GSP-UHV-10-PK
DIY Service Pack for 10",UHV Valve
GVP-UHV-CF250-SS
GVM-UHV-CF250-SS

GSP-HV-10-PK
DIY Service Pack for 10,HV Valve
GVP-HV-ISO250-SS
GVM-HV-ISO250-SS

GSP-UHV-12-PK
DIY Service Pack for 12",UHV Valve
GVP-UHV-CF300-SS
GVM-UHV-CF300-SS

GSP-HV-12-PK
DIY Service Pack for 12",HV Valve
GVP-HV-ISO320-SS
GVM-HV-ISO320-SS

    Any Questions, please contact us.

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy (MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD >
      • PLD-12
    • SPUTTER
    • E-Beam evaporator
    • IBSD
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • Manipulators
    • Transfer Arms
  • Media
  • Contact