Industrial Sputter System
Sputter-500CIR
MAIN SPECIFICATIONS:

Cathode Capabillity:
-3 Rectangular Sputter Cathodes (450mm X 75mm)
-1 Rectangular Ion Source( or Sputter)

Sample Capabillity
-More than 200 pcs 15mmx15mm small sample
or  Multi bar shape samples 
or  Flexible substrate
-Double side coating

  • Custom-type SS316L electro-polished chamber
  • 5E-7 torr Base Pressure (5E-8 torr can reach via replace main pump)
  • Ir heating element with sample heating temperature: 500°C
  • DC, RF, or pulsed-DC power supplies
  • Ion Source
  • Pressure control system: upstream and downstream
  • FBBeam System Control Software

Industrial In-Line Sputter System

System Control Software

FBBEAR software is a multifunctional software to control the whole MSD system, i.e. Manipulator rotation speed, heating program, target revolution, etc.

FBBEAR can control EUROTHERMO2408 to control, tune and save multi-PID parameters for laser/filament heater for the best accuracy of different substrate temperature requirements.

FBBEAR’s Deposition wizard make it hassle free to set, customize and save your experimental recipe and fully automatize the deposition processes. This also allows easy repetition of the deposition process having same experimental parameters. In addition, it also allows recording of data log in order to review past deposition parameters. FBBear also allows data processing and analysis.