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Heater element broken when heat up subtracts under Oxygen or Ozone condition?
Use Adnano-tek Laser heater for PLD and Oxide MBE. 

Triditional heater cannot survivir in oxygen condition because the heater element is very active in high temperature, it is easy to be broken during usage.

We used different way, Adnano-tek provide you ultimate solution. Based on our technology there is no heater element inside chamber; so there is no easy damage parts in the chamber. The laser device is inside controller with cooling device
Very Long life and high heating performance, and Only subtracts are in hot zone rest part of chamber rather cool. 

10X10mm sample laser Heater
​4 inch diameter sample Laser heater

Laser heater is very suitable for oxygen condition survivor high temperature application, like Oxydation Sputter,e-beam deposition and pulsed laser deposition, pld,or called laser mbe

5-Axes UHV Laser Heating Manipulator

MAIN SPECIFICATIONS:
  • Laser power: 70W-2000W (Options)
  • Substrate size: 10x10 mm2 (up to 6-inch diameter)
  • Heating temperature 1200°C (E-3 torr and below) or 1000°C (above 760torr) Fully compatible to oxygen-rich or any atmospheric condition
  • ±1°C temperature stability
  • PID temperature control
  • XYZ axis movements
  • 360° continuous rotation
  • 5° substrate tilt
  • Fan and Water cooling system
  • Pneumatic substrate shutter
  • Real-time temperature monitor by pyrometer (single wavelength, can monitor > 260°C)
  • State-of-the-art and easy operation computer software control
  • For high temperature applications
  • For Oxide-, or any atmospheric condition applications
  • Compatible with all UHV systems
  • Customizable
图片

Compatibility to Oxygen-rich or any Atmospheric Conditions

图片
Designing a high temperature heater for UHV thin-film deposition systems which can work in oxygen-rich or any atmospheric conditions is not easy. Conventional heating materials and mechanisms generate additional vapor pressure from its heating component materials which limits the achievable UHV condition, and oxidize its heating components which consequently deteriorate the heating material and process quality. There are some techniques to overcome this problem, such as Platinum heating element, SiC heating element with well-designed shape, etc. However, each methods has their own issues, such as high maintenance frequency, short life time due to oxidation of heating components, etc.

AdNaNoTek's Laser heating manipulator is developed as a perfect solution for heating your sample for UHV thin-layer deposition in oxygen-rich and any atmospheric conditions. It does not possess the disadvantages that other heaters have. In addition, it is easy-to-use, compact, customizable, and has fast and localized heating mechanism. It is equipped with a pyrometer to monitor the temperature, and has a system control software to automatically control the laser heating parameters and processes.  AdNaNoTek's Laser Heating Manipulator is very suitable for laser oxide/nitride epitaxial techniques.

Localized Heating Area

AdNaNoTek’s Laser Heating Manipulaotr can heat the substrate with well focus beam, such that, only the targeted area will be heated. The heating mechanism is confined in a very small area of the plate, while the surrounding area stay at a relatively low temperature, hence, reducing the outgassing from nearby surfaces. Can heat substrates effectively up to 1-inch diameter.

In addition, the system's support tube remains cool even after 10 hours of operation. No overheating of laser system upon using for long period of time.

Picture

Laser Controller combines number of leading technologies such as...

图片
  • Laser heater module with power supply (standard 200W)
  • Optical fiber
  • Focusing lens with adjustable support
  • Infrared pyrometer for temperature monitoring (with adjustable support)
  • PID temperature control
  • RS232 communication port for remote controlling
  • Control software for real time temperature monitoring, controlling, and alarm

Advantages

  • Heating temperature 1200°C (E-3 torr and below) or 1000°C (above E-3 torr) Fully compatible to oxygen-rich or any atmospheric condition
  • No heating components adds in vapor pressure in the chamber
  • Localized heated area, lesser out-gassing during heating (you can deposit with a cleaner condition)
  • Can process with rapid temperature ramping
  • Easier maintenance compare to traditional substrate heater (the heating element is outside of the vacuum)
  • Direct temperature measurement from sample/substrate by pyrometer
AdNaNoTek UHV Laser Heating Manipulator
Picture
2inch Laser Heater

Optional

  • Liquid nitrogen cooling
  • Customizable manipulator
  • Pulsed heating mode

Related Links:

Brochures and Catalogues
Products
Ultrahigh Vacuum (UHV) Systems
UHV Deposition Systems
Integrated UHV Systems
Customized UHV Systems

UHV Technologies
Thin-film Deposition
Surface Science
Laser Heating Systems

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy (MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD >
      • PLD-12
    • SPUTTER
    • E-Beam evaporator
    • IBSD
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • Manipulators
    • Transfer Arms
  • Media
  • Contact