MPS - 5000: MBE - PLD - SPUTTER

AdNaNoTek's MPS - 5000 is an linear integration system that includes MBE, PLD and MSD deposition tools.
Researchers can operate the systems individually or combine series of deposition process through the UHV Linear Transfer System (LTS).
All systems are UHV compatible (1E-10torr), and the transfer system can be extended indefinitely

---

Integrated Components

Molecular Beam Epitaxy (MBE -10)

MAIN SPECIFICATIONS:

• UHV-compatible chamber
• Base pressure: 1E-10 torr
• Fully cryo panel covered
• 4-axis (XYZ) manipulator with laser heater
  
• Heating temperature up to 1100°C with ± 1°C
  
• 10 effusion cells
• RHEED system
• Beam flux monitor
• All metal leak valve
• 1700l/s cryopump, turbopump, and roughing pump
  
• Pressure control
  
• Full range vacuum gauge
  
• Industrial computer with 23" touchscreen monitor
  
• System control software 

---

Pulsed-Laser Deposition (PLD - 12)

MAIN SPECIFICATIONS:

• 12" spherical chamber
• Base pressure 5E-10torr
• 4-axis (XYZR) manipulator with laser heater
• Heating temperature above 1100°C ± 1°C
• Planetary target manipulator with 6 1-in target holders
• Mask with control software
• Pressure control system
• All metal leak valve
• 1200l/s Pfeiffer turbo pump with roughing pump
• Full range vacuum gauge
• High pressure RHEED system
• Industrial computer with 23" touchscreen monitor
  
• System software Control
• Laser optical path
• Excimer laser (sold separately)

---

UHV-Magnetron Sputtering (MSD - 24)

MAIN SPECIFICATIONS:

• Base pressure 5E-10 torr
  
• 4-axis (XYZR) manipulator with SiC/Mo heater
• Heating temperature up to 900°C
  
• Ion beam assisted source (optional)
• 6 magnetron sputtering source
• Dual mask system with control software
• Thickness monitor
• Pressure control system
• 1200l/s Pfeiffer turbo pump with roughing pump
  
• Full range vacuum gauge
• Industrial computer with 23" touchscreen monitor
• System software Control

---

---

Optional

• Pre-heating (degassing) system
• Automatic transferring system
• ARPES analyzer system
• SEM
• STM
• IBSD

Integrated UHV Systems