Sputter system | e beam evaporator | PLD | Pulsed laser deposition
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Pulsed Laser Deposition System
PLD Series

UHV Pulsed Laser Deposition - PLD-12L

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MAIN SPECIFICATIONS
  • 12inch Spherical SS316L electro-polished Chamber
  • Base Pressure<5E-10 torr
  • Hipace700 Turbo Pump
  • 10mm x 10mm substrate size
  • 5-axis sample manipulator (XYZ, Rotation continuously and Tilt(+/-2degree) 
  • Laser Heating System: sample heating temperature: 1000°C below 100torr, compatible to oxygen-rich and any atmospheric conditions
  • Planetary target manipulator with 6 x 1-inch target holders
  • Laser viewport with "smart defender"
  • All Metal Leak Valve
  • Sample and target in-vacuum transfer 
  • System Control Software with recipe
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Laser Heating Manipulator

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AdNaNoTek's Laser heating system is developed as a perfect solution for heating your sample in oxygen- and nitrogen-rich atmosphere and is UHV compatible.

AdNaNoTek’s Laser Heater can heat the substrate with well focus beam, such that, only the targeted area will be heated. The mechanism with a small distance from the plate stay at a relatively low temperature, reducing the outgassing from nearby surfaces.

In addition, the system's support tube remains cool even after 10 hours of operation.



Target Replacement in Vacuum

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In a traditional PLD system, every time the target material ran out, the system must be vented to air for target replacement, however by doing so, the process parameters and the cleanliness of the system environment will be affected.

AdNaNoTek’s PLD system provides a way to replace the target in UHV condition, so we can maintain the system's cleanliness and process parameters.

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System Control Software

FBBEAR software is a multi-functional software to control the whole PLD system, i.e. Manipulator rotation speed, heating program, target revolution, etc.

FBBEAR can control EUROTHERMO2408 to control, tune and save multi-PID parameters for laser/filament heater for the best accuracy of different substrate temperature requirements.

FBBEAR’s Deposition wizard make it hassle free to set, customize and save your experimental recipe and fully automatize the deposition processes. This also allows easy repetition of the deposition process having same experimental parameters. In addition, it also allows recording of data log in order to review past deposition parameters.


FBBear can do data processing and analysis.

Ultrahigh Vacuum (UHV) Systems
UHV Deposition Systems
Integrated UHV Systems
Customized UHV Systems

UHV Technologies
Thin-film Deposition
Surface Science
Laser Heating Systems

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy ( Laser MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD
    • SPUTTER
    • E-Beam evaporator
    • IBSD and IBE
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Substrate Manipulator
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • XYZ stage
    • Transfer Arms
  • Media
  • Contact