Pulsed Laser Deposition System
PLD Series

UHV Pulsed Laser Deposition - PLD-12L

MAIN SPECIFICATIONS
  • 12inch Spherical SS316L electro-polished Chamber
  • Base Pressure<5E-10 torr
  • Hipace700 Turbo Pump
  • 10mm x 10mm substrate size
  • 5-axis sample manipulator (XYZ, Rotation continuously and Tilt(+/-2degree) 
  • Laser Heating System: sample heating temperature: 1000°C below 100torr, compatible to oxygen-rich and any atmospheric conditions
  • Planetary target manipulator with 6 x 1-inch target holders
  • Laser viewport with "smart defender"
  • All Metal Leak Valve
  • Sample and target in-vacuum transfer 
  • System Control Software with recipe

Laser Heating Manipulator

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AdNaNoTek's Laser heating system is developed as a perfect solution for heating your sample in oxygen- and nitrogen-rich atmosphere and is UHV compatible.

AdNaNoTek’s Laser Heater can heat the substrate with well focus beam, such that, only the targeted area will be heated. The mechanism with a small distance from the plate stay at a relatively low temperature, reducing the outgassing from nearby surfaces.

In addition, the system's support tube remains cool even after 10 hours of operation.

Target Replacement in Vacuum

In a traditional PLD system, every time the target material ran out, the system must be vented to air for target replacement, however by doing so, the process parameters and the cleanliness of the system environment will be affected.

AdNaNoTek’s PLD system provides a way to replace the target in UHV condition, so we can maintain the system's cleanliness and process parameters.

System Control Software

FBBEAR software is a multi-functional software to control the whole PLD system, i.e. Manipulator rotation speed, heating program, target revolution, etc.

FBBEAR can control EUROTHERMO2408 to control, tune and save multi-PID parameters for laser/filament heater for the best accuracy of different substrate temperature requirements.

FBBEAR’s Deposition wizard make it hassle free to set, customize and save your experimental recipe and fully automatize the deposition processes. This also allows easy repetition of the deposition process having same experimental parameters. In addition, it also allows recording of data log in order to review past deposition parameters.

FBBear can do data processing and analysis.