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In a traditional PLD system, every time the target material ran out, the system must be vented to air for target replacement, however by doing so, the process parameters and the cleanliness of the system environment will be affected.
AdNaNoTek’s PLD system provides a way to replace the target in UHV condition, so we can maintain the system's cleanliness and process parameters. |
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Related Links:
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Ultrahigh Vacuum (UHV) Systems
UHV Deposition Systems Integrated UHV Systems Customized UHV Systems |
UHV Technologies
Thin-film Deposition Surface Science Laser Heating Systems |