​PLD-12-Super

• Single chamber
• Sputter with 2×2 in sputter cathodes
• 12 in cylinder SS 316L electro-polished chamber
• < 5E(-7) torr base pressure
• Excimer laser source with 6×1 in (or 3×2 in) planetary  targets
• Thermal evaporator with 3 boats
• Laser viewport with “smart defender”
• Substrate 10×10 mm2 with fixed position
• With laser heating element Ts could reach up to 1000 C in Oxygen rich ambiance
• FBBEAR entire system control software

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PLD-12L

• 5-axes sample manipulator: XYZ, rotation and tilt
• 12 in spherical SS 316L electro-polished chamber
• < 5E(-10) torr base pressure
• Excimer laser source with 6×1 inch (or 3×2 inch) planetary  targets
• Thermal evaporator with 3 boats
• Laser viewport with “smart defender”
• Substrate 10×10 mm2 with fixed position
• With laser heating element Ts could reach up to 1000 C in Oxygen rich ambiance
• Modular design
• FBBEAR entire system control software

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PLD-18L

• SS 316L 18 inch spherical electro polished chamber
• Base pressure 5E(-10) torr
• Wafer size 10×10 mm2, up to 2 in
• 5-axes substrate manipulator (XYZ, rotation and tilt)
• Laser substrate heater up to 1200 C
• Laser viewport with “smart defender”
• Compatible with oxygen rich ambience
• Planetary target manipulator with 8×1in (or 4×2 in) targets
• FBBEAR entire system control software
• Modular design
• RHEED set up
• Mask system with z-motion (opt)
• Pressure control system: upstream or downstream (opt)

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