PM - 2500: PLD - MBE/E-Beam Evaporator Cluster System

PM - 2500 is a compact cluster system that includes PLD and MBE/E-Beam Evaporator (CIGS) deposition systems.

The system is UHV compatible (5E-9 torr), and samples can be transferred using transfer rod. 

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Cluster Systems

Pulsed-Laser Deposition System 

MAIN SPECIFICATIONS:

• Cylindrical chamber
• Base pressure: 5E-10 torr
  
• 4-axis manipulator with SiC Heater
• Heating temperature above 800°C ± 1°C
• 6 1" planetary target holder (target size depends upon request)
  
• All metal leak valve
• 685l/s Pfeiffer turbo pump
• Full range vacuum gauge
• System control software
• Industrial computer

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MBE/E-Beam Evaporator (CIGS)

MAIN SPECIFICATIONS:

• Cylindrical Chamber
  
• Base pressure: 5E-10 torr
  
• 2-axis (ZR) manipulator with heating system
  
• PBN heater with temperature up to 900°C
  
• E-beam source
  
• 2 Effusion cells
  
• Thickness monitor
• Pressure control system
• 700l/s Pfeiffer turbo pump
• Full range vacuum gauge
• System control software
• Industrial computer

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Load Lock

MAIN SPECIFICATIONS:

• Base pressure: 5E-7 torr
• Sample holder with Z-adjustment
  
• Turbo pump with dry pump
  
• Full range vacuum gauge
  
• Quick Access Door with view port
  

Integrated UHV Systems