Sputter system | e beam evaporator | PLD | Pulsed laser deposition
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PM - 2500: PLD - MBE/E-Beam Evaporator Cluster System

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PM - 2500 is a compact cluster system that includes PLD and MBE/E-Beam Evaporator (CIGS) deposition systems.

The system is UHV compatible (5E-9 torr), and samples can be transferred using transfer rod. 


Cluster Systems

Pulsed-Laser Deposition System 

MAIN SPECIFICATIONS:
  • Cylindrical chamber
  • Base pressure: 5E-10 torr
  • 4-axis manipulator with SiC Heater
  • Heating temperature above 800°C ± 1°C
  • 6 1" planetary target holder (target size depends upon request)
  • All metal leak valve
  • 685l/s Pfeiffer turbo pump
  • Full range vacuum gauge
  • System control software
  • Industrial computer
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MBE/E-Beam Evaporator (CIGS)

MAIN SPECIFICATIONS:
  • Cylindrical Chamber
  • Base pressure: 5E-10 torr
  • 2-axis (ZR) manipulator with heating system
  • PBN heater with temperature up to 900°C
  • E-beam source
  • 2 Effusion cells
  • Thickness monitor
  • Pressure control system
  • 700l/s Pfeiffer turbo pump
  • Full range vacuum gauge
  • System control software
  • Industrial computer
图片

Load Lock

MAIN SPECIFICATIONS:
  • Base pressure: 5E-7 torr
  • Sample holder with Z-adjustment
  • Turbo pump with dry pump
  • Full range vacuum gauge
  • Quick Access Door with view port
图片
Integrated UHV Systems
Ultrahigh Vacuum (UHV) Systems
UHV Deposition Systems
Integrated UHV Systems
Customized UHV Systems

UHV Technologies
Thin-film Deposition
Surface Science
Laser Heating Systems

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy ( Laser MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD
    • SPUTTER
    • E-Beam evaporator
    • IBSD and IBE
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Substrate Manipulator
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • XYZ stage
    • Transfer Arms
  • Deposition systems_N
    • EBV_N
    • MBE_N
    • Magnetron Sputtering_N
    • PLD_N
    • Ion Beam Sputter Deposition_N
  • Direct Laser Writer_N
  • Media
  • Contact