PM - 2500: PLD - MBE/E-Beam Evaporator Cluster System

PM - 2500 is a compact cluster system that includes PLD and MBE/E-Beam Evaporator (CIGS) deposition systems.

The system is UHV compatible (5E-9 torr), and samples can be transferred using transfer rod. 

Cluster Systems

Pulsed-Laser Deposition System 

MAIN SPECIFICATIONS:
  • Cylindrical chamber
  • Base pressure: 5E-10 torr
  • 4-axis manipulator with SiC Heater
  • Heating temperature above 800°C ± 1°C
  • 6 1" planetary target holder (target size depends upon request)
  • All metal leak valve
  • 685l/s Pfeiffer turbo pump
  • Full range vacuum gauge
  • System control software
  • Industrial computer

MBE/E-Beam Evaporator (CIGS)

MAIN SPECIFICATIONS:
  • Cylindrical Chamber
  • Base pressure: 5E-10 torr
  • 2-axis (ZR) manipulator with heating system
  • PBN heater with temperature up to 900°C
  • E-beam source
  • 2 Effusion cells
  • Thickness monitor
  • Pressure control system
  • 700l/s Pfeiffer turbo pump
  • Full range vacuum gauge
  • System control software
  • Industrial computer

Load Lock

MAIN SPECIFICATIONS:
  • Base pressure: 5E-7 torr
  • Sample holder with Z-adjustment
  • Turbo pump with dry pump
  • Full range vacuum gauge
  • Quick Access Door with view port