Sputter system | e beam evaporator | PLD | Pulsed laser deposition
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SE - 4500: MSD - E-BE/MBE

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AdNaNoTek 's SE - 4500 is an linear integration system including Magnetron Sputtering and E-Beam Evaporator (with effusion cell module) coating tools.

Researchers can operate the systems individually or combine multi/different coating process through the UHV linear transferring system.

All systems are UHV compatible (5E-9torr) in SE - 4500, and the tunnel system can be extended unlimitedly. 

Integrated Components

UHV-Magnetron Sputtering System (MSD-24)

MAIN SPECIFICATIONS:
  • 24-in Cylindrical dome shape chamber
  • Substrate size: 2-in
  • Base pressure 5E-10torr
  • 4-axis manipulator
  • SiC heating element
  • Heating temperature up to 800°C
  • 6 magnetron sputtering source (max 6 available)
  • 1 RF and 3 DC Power Supply
  • Water cooling
  • Thickness monitor
  • 1200l/s Pfeiffer turbo pump
  • Differential pumping mechanism
  • MFC and Pressure control system
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software
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Electron Beam Evaporator with Effusion Cell Module (E-Beam-1M)

MAIN SPECIFICATIONS:
  • 16.5" Cylindrical chamber
  • Base pressure 5E-10torr
  • Substrate size: 2-in
  • 4-axis manipulator (1)
  • SiC Heating Element
  • Heating temperature above 800°C
  • 360° tiltable manipulator (2)
  • <100K liquid nitrogen cooling
  • E-gun source
  • 6kW Power source
  • 2 effusion cells
  • Water cooling
  • Single mask with control software
  • 2300l/s Pfeiffer turbo pump
  • MFC and Pressure control system
  • All metal leak valve
  • Full range vacuum gauge
  • Industrial computer with 23" touchscreen
  • FBBear system control software
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Optional

  • Pre-heating (degassing) system
  • Automatic transferring system
  • ARPES analyzer system
  • SEM
  • STM
  • IBSD
Integrated UHV Systems
Ultrahigh Vacuum (UHV) Systems
UHV Deposition Systems
Integrated UHV Systems
Customized UHV Systems

UHV Technologies
Thin-film Deposition
Surface Science
Laser Heating Systems

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy ( Laser MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD
    • SPUTTER
    • E-Beam evaporator
    • IBSD and IBE
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Substrate Manipulator
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • XYZ stage
    • Transfer Arms
  • Media
  • Contact