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Shielding Gate Valves

Special feature for hash process in semi-contactor industrial 

Design Concern


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Mechanical Design

The shielding install for protection of mechanism, it can prevent chemical particles to damage bearings.

FFKM O-Ring is available, please contact us for further information.

​

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Accessory Design

Shielding Gate Valve also option for heating jacket.

In the hash process, the chemical particles are easy to attach on metal surface, the pumping line may be stuck. The heater provide stable temperature to keep away the particles.

​

Our heating jacket's form is made by "Nano-aerogel super insulation material" with extremely low thermal conductivity for reducing heat loss.

Etched stainless steel foil as the heating element
Repeatable
No variation between heaters

Reliable
Contact pads is significantly bigger for spot welding

Uniform temperature
Heating film covers >40% of heating area!

Low cost
Less labor intensiv​e
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Advantage of Nano-Aerogel

Lowest thermal conductivity!!!!
Best Insulation material!!!!


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HV Pneumatic & Manual Shielding Gate Valve Series


​Features

​

- Sizes are from 4", 6", 8" and 10".
​
- Special design for mechanism's protection, application for hash processing (chemical gases).

​- Easy to maintenance, 2 steps to disassemble the valves for O-Ring replacement.

- Small footprint, compact design, saving space.

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Seal Materials
Specification
​​Mechanical Feedthrough
Welded Bellows AM350
Bonnet Seal
O-Ring (FKM)
Gate Seal
O-Ring (FKM)
O-Ring (FFKM) optional
HV Pneumatic & Manual Shielding Gate Valves Series
Specification 
Operating Options
​​Pneumatic and wheel manual operating 
Device Safety 
​(Manual version)

​Manual Safety Lock 
​(Only option for manual valves)
Operating pressure (Pneumatic version)
4~7 kgf/cm2
Vacuum Rate
1.4 ~ 1.33x10-9 mbar
Valve Body Leak Rate
5x10-9 mbar l/s, He
Gate Seal Leak Rate
1.33x10-9 mbar l/s, He
​Position Indicator (Pneumatic Version)
Position Indicator (Wheel Manual)
​Reed Type Sensor 
Visual Device

Product Information

We also provide all products details in CAD and STP files, please contact us for further information.

Vacuum Level
​Normial OD
Operation option
Flange type and sizes
Part Number
HV
4"
Pneumatic
DN 100 ISO-F
SGVP-HV-ISO100-SS
HV
6"
Pneumatic
DN 160 ISO-F
SGVP-HV-ISO160-SS
HV
8"
Pneumatic
DN 200 ISO-F
SGVP-HV-ISO100-SS
HV
4"
Manual
DN 100 ISO-F
SGVM-HV-ISO100-SS
HV
6"
Manual 
DN 160 ISO-F
SGVM-HV-ISO160-SS
HV
8"
Manual
DN 200 ISO-F
SGVM-HV-ISO200-SS
PLEASE CONTACT US FOR ORDER 
Order Now!!!

Solenoid Option for Pneumatic Shielding Gate Valves


Solenoid Options:
Normial OD
Flange type and sizes
Solenoid Voltage Option
Part number
4"
DN 100 ISO-F
DC12V
SGVP-HV-ISO100-SS-S12
6"
DN 160 ISO-F
DC12V
SGVP-HV-ISO160-SS-S12
8"
DN 200 ISO-F
DC12V
SGVP-HV-ISO200-SS-S12
4"
DN 100 ISO-F
DC24V
SGVP-HV-ISO100-SS-S24
6"
DN 160 ISO-F
DC24V
SGVP-HV-ISO160-SS-S24
8"
DN 200 ISO-F
DC24V
SGVP-HV-ISO200-SS-S24
4"
DN 100 ISO-F
AC110V
SGVP-HV-ISO100-SS-S110
6"
DN 160 ISO-F
AC110V
SGVP-HV-ISO160-SS-S110
8"
DN 200 ISO-F
AC110V
SGVP-HV-ISO200-SS-S110
4"
DN 100 ISO-F
AC220V
SGVP-HV-ISO100-SS-S220
6"
DN 160 ISO-F
AC220V
SGVP-HV-ISO160-SS-S220
8"
DN 200 ISO-F
AC220V
SGVP-HV-ISO200-SS-S220
PLEASE CONTACT US FOR ORDER ​
Order Now!!!

Safety Option for Manual Shielding Gate Valves


Manual Safety Lock:
Picture
Normial OD
Flange type and sizes
Part number
4"
DN 100 ISO-F
SGVM-HV-ISO100-SS-MSL
6"
DN 160 ISO-F
SGVM-HV-ISO160-SS-MSL
8"
DN 200 ISO-F
SGVM-HV-ISO160-SS-MSL
PLEASE CONTACT US FOR ORDER ​
Order Now!!!

Heating Jacket Option


Aerogel form Heating Jacket :
Picture
Normial OD
Flange type and sizes
Order number
4"
DN 100 ISO-F
HJ100
6"
DN 160 ISO-F
HJ160
8"
DN 200 ISO-F
HJ200

PLEASE CONTACT US FOR ORDER ​
Order Now!!!

Catalog Download
Picture
adnano-tek_vacuum_shielding_gate_valves.pdf
File Size: 725 kb
File Type: pdf
Download File

    Any Questions, please contact us.

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy ( Laser MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD
    • SPUTTER
    • E-Beam evaporator
    • IBSD and IBE
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Substrate Manipulator
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • XYZ stage
    • Transfer Arms
  • Media
  • Contact