ChambersUHV and HV chambers, send us your idea and we help you from design, budget control and fabrication.
We provide SS304L, 316L and AL6061 materials. Isolation Gate ValvesFor pumps connection or transfer door applications.
Special ceramics ball type mechanism, more purity!! UHV and HV grades in both pneumatic and manual versions. ManipulatorsUHV grade manipulation devices.
XYZ and Z stage in both manual and motorize control. |
Customize WeldmentsForeline and pumping line design and fabrication.
We also provide solution for the hardware accessories, please check with us. Shielding Gate ValvesSpecial design for hash process application.
For dry pump connection and best solution for semiconductor industry. Special heating jacket for better performance. Transfer ArmsUHV grade sample transfer device.
We provide size up to 3 meters. |
Ultrahigh Vacuum (UHV) Systems
UHV Deposition Systems Integrated UHV Systems Customized UHV Systems |
UHV Technologies
Thin-film Deposition Surface Science Laser Heating Systems |