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Features: - Up to 4" (100mm) Z travel. - 1/2" (12.5mm) X,Y travel. - UHV compatible. - Manual & Motorize options. |
Operation |
Normial OD |
Flange type and sizes |
Part number |
Motorized-XYZ stage |
4" |
DN100CF |
MZ3-CF100 |
Motorized-XYZ stage |
6" |
DN160CF |
MZ3-CF160 |
Manual-XYZ stage |
4" |
DN100CF |
MM3-CF100 |
Manual-XYZ stage |
6" |
DN160CF |
MM3-CF100 |
Motorized-Z stage |
1-1/2" |
DN40CF |
MZ1-CF40 |
Manual-Z stage |
3/4" |
DN16CF |
MM1-CF16 |
Manual-Z stage |
1-1/2" |
DN40CF |
MM1-CF40 |
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Ultrahigh Vacuum (UHV) Systems
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UHV Technologies
Thin-film Deposition Surface Science Laser Heating Systems |