Sputter system | e beam evaporator | PLD | Pulsed laser deposition
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Picture
Picture

​3-Axis Manipulators

UHV Manipulators

Product's Features



Features:
- Up to 4" (100mm) Z travel.
- 1/2"  (12.5mm) X,Y travel.
- UHV compatible.
- Manual & Motorize options.



Product's Specification


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Picture
UHV Manipulator Series
Specification
Flange Material
SUS304
Body Material
AL6061 with anodized 
Feedthrough Material
Welded Bellows in AM350
Leak rate 
1x10-10 mbar l/s, He
Vacuum Rate 
1x10-10 mbar
Temperature Range
-20ºC to 230ºC

Product's Information


Operation
Normial OD
Flange type and sizes
Part number
Motorized-XYZ stage
4"
DN100CF
MZ3-CF100
Motorized-XYZ stage
6"
DN160CF
MZ3-CF160
Manual-XYZ stage
4"
DN100CF
MM3-CF100
Manual-XYZ stage
6"
DN160CF
MM3-CF100
Motorized-Z stage
1-1/2"
DN40CF
MZ1-CF40
Manual-Z stage
3/4"
DN16CF
MM1-CF16
Manual-Z stage
1-1/2"
DN40CF
MM1-CF40

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  • AdNaNotek
    • News
    • Online Catalogs
    • Articles >
      • Scientific Papers Generated >
        • Scientific Papers PLD
        • Scientific Papers MSD
        • Scientific Papers MBE
      • Certifications ISO 9001
      • Events
    • UHV Technology >
      • E-Beam Research
      • CIGS Research
      • UHV Deposition Techniques >
        • Molecular Beam Epitaxy ( Laser MBE)
        • Pulsed Laser Deposition (PLD)
        • Magnetron Sputtering Deposition (MSD)
        • Electron Beam Evaporator (EBE)
        • Ion-Beam Sputter Deposition (IBSD)
        • Plasma Enhanced Atomic Layer Deposition (PEALD)
      • FBBear System Control Software
      • Useful Data
    • Profile
  • PVD
    • Industrial >
      • Large Sputter
      • Industrial E-Beam
    • MBE
    • PLD
    • SPUTTER
    • E-Beam evaporator
    • IBSD and IBE
    • Josephson Junction E-Beam(Qubit manufacture)
    • Customized UHV Systems
  • Laser Heater
  • UHV Cluster System
  • ALD and CVD
    • Etching >
      • RIE 80
      • Plasma-80ICP
      • Remote Plasma source
    • ALD (Atomic Layer Deposition)
  • UHV design & components
    • Substrate Manipulator
    • Chambers
    • Custom Weldments
    • Isolation Vacuum Gate Valves
    • Shielding Gate Valves
    • XYZ stage
    • Transfer Arms
  • Media
  • Contact