Product's Features

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Features:
- Up to 4" (100mm) Z travel.
- 1/2"  (12.5mm) X,Y travel.
- UHV compatible.
- Manual & Motorize options.

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Product's Specification

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UHV Manipulator Series	Specification
Flange Material	SUS304
Body Material	AL6061 with anodized
Feedthrough Material	Welded Bellows in AM350
Leak rate	1x10-10 mbar l/s, He
Vacuum Rate	1x10-10 mbar
Temperature Range	-20ºC to 230ºC

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Product's Information

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Operation	Normial OD	Flange type and sizes	Part number
Motorized-XYZ stage	4"	DN100CF	MZ3-CF100
Motorized-XYZ stage	6"	DN160CF	MZ3-CF160
Manual-XYZ stage	4"	DN100CF	MM3-CF100
Manual-XYZ stage	6"	DN160CF	MM3-CF100
Motorized-Z stage	1-1/2"	DN40CF	MZ1-CF40
Manual-Z stage	3/4"	DN16CF	MM1-CF16
Manual-Z stage	1-1/2"	DN40CF	MM1-CF40

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